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1 article(s) from Cirillo, Matteo

Anodization-based process for the fabrication of all niobium nitride Josephson junction structures

Massimiliano Lucci,
Ivano Ottaviani,
Matteo Cirillo,
Fabio De Matteis,
Roberto Francini,
Vittorio Merlo and
Ivan Davoli

Beilstein J. Nanotechnol. 2017, 8, 539–546, doi:10.3762/bjnano.8.58

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Figure 1: a) Glow-discharge peak intensity monitored in the region of 328–367 nm, an energy region in which w...

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Figure 2: The color of the plasma corresponding to the six increasing values of the input flux described in Figure 1 ...

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Figure 3: 3D plot constructed to optimize sputter deposition. Each point of the grid corresponds to a sample ...

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Figure 4: Critical temperature T_c of NbN as a function of the N₂ flux and of the of N₂/Nb peak ratio. In the ...

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Figure 5: Spectrum of the emission lines. Details of AlN for different values of N₂ flux (starting from 0 and...

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Figure 6: Resistivity of AlN film as a function of N₂/Ar gas flux and Ar/N₂ peak ratio. The rf power was fixe...

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Figure 7: Film voltages as a function of the time obtained varying the current density and compliance voltage...

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Figure 8: Optical microscopy images at 100× magnification of a) sample 1 in a) and b) sample 6. The upper par...

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Figure 9: Scheme of the oxidized film grown on NbN. The total thickness of the oxide (T_EXT + T_INT) is higher ...

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Figure 10: Auger electron spectroscopy of the initial NbN sample before and after anodization. A soft surface ...

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Figure 11: a) Current–voltage characteristic for NbN Josephson junction and b) diffraction pattern obtained me...

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Figure 12: A section of our samples indicating the layers of the fabrication steps and their relative thicknes...

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Full Research Paper

Published 02 Mar 2017

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